Integration Of Polymer Microfluidic Channels, Vias, And Connectors With Silicon Photonic Sensors By One-Step Combined Photopatterning And Molding Of OSTE

QC 20130718
We demonstrate a method for the fast and simple packaging of silicon sensors into a microfluidic package consisting of the recently introduced {OSTE} polymer. The microfluidic layer is first microstructured and thereafter dry-bonded to a silicon photonic sensor, in a process compatible with wafer-level production, and with the entire packaging process lasting only 10 minutes. The fluidic layer combines molded microchannels and fluidic (Luer) connectors with photopatterned through-holes (vias) for optical fiber probing and fluid connections. All the features are fabricated in a single photocuring step. We report measurements with an integrated silicon photonic {Mach-Zehnder} interferometer refractive index sensor packaged by these means.

Saharil, FarizahKTH,Mikro- och nanosystemteknik(Swepub:kth)u1481q3i (author)
Mola Romero, Albert (author)
Sandström, NiklasKTH,Mikro- och nanosystemteknik(Swepub:kth)u1m0o5yh (author)
Shafagh, Reza Z.KTH,Mikro- och nanosystemteknik(Swepub:kth)u1pwebmi (author)
Wijngaart, Wouter van derKTH,Mikro- och nanosystemteknik(Swepub:kth)u1wdbont (author)
Haraldsson, TommyKTH,Mikro- och nanosystemteknik(Swepub:kth)u1ohdrr6 (author)
Gylfason, Kristinn B.,1978-KTH,Mikro- och nanosystemteknik(Swepub:kth)u1v3y7u7 (author)
KTHMikro- och nanosystemteknik (creator_code:org_t)

In:Proceedings of the 2013 17th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers): IEEE conference proceedings, s. 1613-1616

By the author/editor: Errando-Herranz, ...; Saharil, Farizah; Mola Romero, Alb ...; Sandström, Nikla ...; Shafagh, Reza Z.; Wijngaart, Woute ...; show more...; Haraldsson, Tomm ...; Gylfason, Kristi ...; show less...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

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