Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits

Tang, YongboKTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP (author)

QC 20100906
We present design, fabrication, and characterization of a silicon-on-insulator grating coupler of high efficiency for coupling between a silicon nanophotonic waveguide and a single mode fiber. By utilizing the lag effect of the dry etching process, a grating coupler consisting of nonuniform grooves with different widths and depths is designed and fabricated to maximize the overlapping between the upward wave and the fiber mode. The measured waveguide-to-fiber coupling efficiency of 64% (−1.9 dB) for the transverse electric polarization is achieved by the present nonuniform grating coupler directly defined on a regular silicon-on-insulator wafer.

Wang, ZhechaoKTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP(Swepub:kth)u13iwjtb (author)
Wosinski, LechKTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP(Swepub:kth)u1ywmbo9 (author)
Westergren, UrbanKTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP(Swepub:kth)u1pl0i0x (author)
He, SailingKTH,Mikroelektronik och tillämpad fysik, MAP,Zhejiang-KTH Joint Research Center of Photonics, JORCEP(Swepub:kth)u1tir6md (author)
KTHMikroelektronik och tillämpad fysik, MAP (creator_code:org_t)

By the author/editor: Tang, Yongbo; Wang, Zhechao; Wosinski, Lech; Westergren, Urba ...; He, Sailing

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.