WFRF:(Liljeholm Jessica)
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- Liljeholm, JessicaSilex Microsystems, Stockholm, Sweden (author)
Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ
- Article/chapterEnglish2015
Publisher, publication year, extent ...
- IEEE conference proceedings,2015
- electronicrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-172290
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-172290URI
- https://doi.org/10.1109/TRANSDUCERS.2015.7181047DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- QC 20150828
- This paper reports of fabricated unpatterned ferromagnetic NiFe/AlN multilayer composites and an established process flow for magnetic core material suitable for integration with Silex 3D RF TSV technology. The fabricated single-loop test inductors achieved an inductance enhancement of 4.8 and a quality factor enhancement of 4.5 at 400 MHz. Simulations show that magnetic material in connection with 3D TSV inductors result in an inductance enhancement up to a factor of 5 at GHz frequencies for the same inductor area or the same inductance can be achieved at 9 times smaller area and cost.
Subject headings and genre
- TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
- ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
- MEMS foundry
- NiFe/AlN multilayer composite
- RF microstrip
- magnetic materials
- micromachined inductors
Added entries (persons, corporate bodies, meetings, titles ...)
- Ebefors, ThorbjörnSilex Microsystems, Stockholm, Sweden (author)
- Rohrmann, HartmutEvatec Advanced Technologies AG, Balzers, Liechtenstein (author)
- Shah, UmerKTH,Mikro- och nanosystemteknik,RF MEMS(Swepub:kth)u14ptvpw (author)
- Oberhammer, JoachimKTH,Mikro- och nanosystemteknik,RF MEMS(Swepub:kth)u12600dy (author)
- Silex Microsystems, Stockholm, SwedenEvatec Advanced Technologies AG, Balzers, Liechtenstein (creator_code:org_t)
Related titles
- In:Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on: IEEE conference proceedings, s. 811-814
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