Light coupling and distribution for Si3N4/SiO2 integrated multichannel single-mode sensing system

• We present an efficient and highly alignment-tolerant light coupling and distribution system for a multichannel Si3N4/SiO2 single-mode photonics sensing chip. The design of the input and output couplers and the distribution splitters is discussed. Examples of multichannel data obtained with the system are given.

Nyckelord

optical systems

integrated optics

sensors

waveguides

wave-guide

biochemical sensor

grating couplers

microwaveguides

resonator

splitter

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