Fabrication of an Infrared Emitter using a Generic Integration Platform Based on Wire Bonding

Schröder, Stephan,1979-KTH,Mikro- och nanosystemteknik,SenseAir AB, Sweden (författare)

QC 20161121
This paper reports a novel approach for the fabrication of infrared (IR)emitters for non-dispersive infrared gas sensing. The proposed concept enables theintegration of superior resistive heater materials with microelectromechanical systems(MEMS) structures. In this study, non-bondable filaments made of nickel chromium areattached to mechanical attachment structures using a fully automated state-of-the-artwire bonder. The formation of the electrical contacts between the integrated filamentsand the electrical contact pattern on the substrate is performed using conventionalgold stud bumping technology. The placement accuracy of the integrated filamentsis evaluated using white-light interferometry, while the contact formation using studbumping to embed the filaments is investigated using focus ion beam milled crosssections.A proof-of-concept IR emitter has been successfully operated and heated upto 960 C in continuous mode for 3 hours.

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
wire bonding
integration platform
stud bumping
non-bondable materials
IR emitter
MEMS-based infrared emitter
NDIR gas sensing

Rödjegård, HenrikSenseAir AB, Sweden (författare)
Fischer, Andreas C.KTH,Mikro- och nanosystemteknik,Karlsruhe Institute of Technology (KIT), Germany(Swepub:kth)u1pfkzjx (författare)
Stemme, GöranKTH,Mikro- och nanosystemteknik(Swepub:kth)u1oyebfq (författare)
Niklaus, FrankKTH,Mikro- och nanosystemteknik(Swepub:kth)u1bcu8r2 (författare)
KTHMikro- och nanosystemteknik (creator_code:org_t)

Ingår i:Journal of Micromechanics and Microengineering: Institute of Physics (IOP)26:110960-13171361-6439

Av författaren/redakt...: Schröder, Stepha ...; Rödjegård, Henri ...; Fischer, Andreas ...; Stemme, Göran; Niklaus, Frank

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