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The role of Ohmic h...
The role of Ohmic heating in dc magnetron sputtering
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- Brenning, Nils (author)
- Linköpings universitet,KTH,Rymd- och plasmafysik,Linköping University, Sweden; Université Paris-Sud, France,Plasma och ytbeläggningsfysik,Tekniska fakulteten,KTH Royal Institute Technology, Sweden; University of Paris Saclay, France
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- Gudmundsson, Jon Tomas (author)
- KTH,Rymd- och plasmafysik,KTH Royal Institute Technology, Sweden; University of Paris Saclay, France; University of Iceland, Iceland
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- Lundin, D. (author)
- University of Paris Saclay, France
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- Minea, T. (author)
- University of Paris Saclay, France
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- Raadu, Michael A. (author)
- KTH,Rymd- och plasmafysik,Université Paris-Sud, France,KTH Royal Institute Technology, Sweden
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- Helmersson, Ulf (author)
- Linköpings universitet,Plasma och ytbeläggningsfysik,Tekniska fakulteten
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(creator_code:org_t)
- 2016-11-15
- 2016
- English.
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In: Plasma sources science & technology. - : Institute of Physics Publishing (IOPP). - 0963-0252 .- 1361-6595. ; 25:6
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Abstract
Subject headings
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- Sustaining a plasma in a magnetron discharge requires energization of the plasma electrons. In this work, Ohmic heating of electrons outside the cathode sheath is demonstrated to be typically of the same order as sheath energization, and a simple physical explanation is given. We propose a generalized Thornton equation that includes both sheath energization and Ohmic heating of electrons. The secondary electron emission yield gamma(SE) is identified as the key parameter determining the relative importance of the two processes. For a conventional 5 cm diameter planar dc magnetron, Ohmic heating is found to be more important than sheath energization for secondary electron emission yields below around 0.1.
Subject headings
- NATURVETENSKAP -- Fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences (hsv//eng)
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
Keyword
- magnetron sputtering
- Ohmic heating
- energy balance
Publication and Content Type
- ref (subject category)
- art (subject category)
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