Lateral performance evaluation of laser micromachining by highprecision optical metrology and image analysis

• Today several techniques are available for micro-manufacturing. Yet, it is difficult to assess the precisionand lateral X,Y accuracy of these techniques. The available accuracy information is usually based on spec-ifications given by machine suppliers. This information is based on in-house laboratory tests performedby dedicated machine operators and within an adapted environment. In practice, the accuracy is likelyto vary due to environmental conditions, materials and operator skills. In order to check the specifica-tions in realistic environments the EUMINAfab infrastructure consortium initiated a set of independenthigh precision onsite verification tests on different laser micromachining installations. In addition toproviding performance verification, it gave the participating partners real capability information of theirequipment and possibilities to improve machining performance to a higher level. In this study a compre-hensive verification test was designed and carried out by using a high precision metrology method for 2Dmeasurements based on subpixel resolution image analysis. This methodology improved our knowledgeof the capabilities of three laser micromachining installations, and showed that specifications at singlemicron levels are hard to obtain.

Nyckelord

Verification test

Performance evaluation

Quality audit

Error

Accuracy

Precision metrology

Repeatability

Laser micro-machining

Image processing

Image analysis

Image metrology

Sub-pixel

Production Engineering

Industriell produktion

Publikations- och innehållstyp

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