Thickness dependent performance of Na0.5K0.5NbO3/sapphire thin film varactors

• Perfect c-axis oriented Na0.5K0.5NbO3 (NKN) films have been pulsed laser deposited on Al2O3(01 (1) under bar2) single crystals (r-cut sapphire) for voltage tunable microwave device applications. Thickness dependence of dielectric performance of the NKN/sapphire interdigital capacitors (IDCs) has been studied. 40 V bias tunability and dielectric loss tandelta of 4 burr slot IDCs have been found to be 24.6 % and 2.86 % for 1.2 mum thick NKN film, and 6.1 % and 0.83 % for 0.14 mum thick NKN film, respectively. Low leakage currents and high breakdown voltages are observed in these structures.

Nyckelord

tunable ferroelectric film

thickness dependence

interdigital capacitor

capacitors

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