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Dielectric properties and Schottky barriers in silver tantalate-niobate thin film capacitors

Koh, J. H. (author)
Moon, B. M. (author)
Grishin, Alexander M. (author)
KTH,Mikroelektronik och informationsteknik, IMIT
 (creator_code:org_t)
2001
2001
English.
In: Integrated Ferroelectrics. - 1058-4587 .- 1607-8489. ; 39:1-4, s. 1361-1368
  • Journal article (peer-reviewed)
Abstract Subject headings
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  • Submicron thick ferroelectric Ag(Ta,Nb)O-3 films have been pulsed laser deposited on the bulk Pt80Ir20 polycrystalline substrates. They are ferroelectric at temperatures below 125 K with the remnant polarization of 0.4 muC/cm(2) @ 77K and paraelectric at higher temperatures with tandelta @ 100 kHz as low as 0.015. Extensive I-V characterization has been performed in a wide temperature range 77 K to 350 K for vertical Me/Ag(Ta,Nb)O-3/Pt80Ir20 capacitive cells, where the metals Me = Pd, Au, Cr, and Al have been used as a top electrode. The electronic transport in thin Me/Ag(Ta,Nb)O-3/Pt80Ir20 capacitors follows the Schottky emission mechanism with the barrier height for the Pd, Au, Cr, and Al of 0.85, 0.8, 0.74, and 0.69 eV, respectively.

Keyword

Ag(Ta,Nb)O-3 films
loss tangent
Schottky emission
barrier height
work function

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Moon, B. M.
Grishin, Alexand ...
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Royal Institute of Technology

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