Non-destructive pulsed technique to characterize functional properties of micromachined bulk PZT

• In this report, a non-destructive pulsed technique is presented to characterize all relevant properties of machined bulk PZT material. The proposed method is based on recording of the transient current as response on the short voltage pulse applied to the ferroelectric acoustic element. This new promising experimental technique makes it possible to measure mechanical and electrical properties fast, reliably and reproducibly. Among other results we can obtain electromechanical coupling coefficient, dielectric loss factor tan 8, mechanical quality factor Q, dielectric constant, capacitance, resonant frequency and Curie temperature T-c. The temperature dependence of above mentioned parameters can be studied as well very easily.

Keyword

non-destructive pulsed technique

microelectromechanical systems

PZT

material properties

fatigue

Publication and Content Type

ref (subject category)

art (subject category)