MEMS for Photonic Integrated Circuits

• The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications.

Ämnesord

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Nyckelord

Tuning

Micromechanical devices

Optical waveguides

Integrated optics

Optical refraction

Optical variables control

Nonlinear optics

Microelectromechanical systems

photonic integrated circuits

silicon photonics

photonics

nanophotonics

integrated optics

nanoelectromechanical systems

MEMS

PIC

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)