A Silicon Carbide 256 Pixel UV Image Sensor Array Operating at 400 degrees C

QC 20200325
An image sensor based on wide band gap silicon carbide (SiC) has the merits of high temperature operation and ultraviolet (UV) detection. To realize a SiC-based image sensor the challenge of opto-electronic on-chip integration of SiC photodetectors and digital electronic circuits must be addressed. Here, we demonstrate a novel SiC image sensor based on our in-house bipolar technology. The sensing part has 256 ( $16\times 16$ ) pixels. The digital circuit part for row and column selection contains two 4-to-16 decoders and one 8-bit counter. The digital circuits are designed in transistor-transistor logic (TTL). The entire circuit has 1959 transistors. It is the first demonstration of SiC opto-electronic on-chip integration. The function of the image sensor up to 400 degrees C has been verified by taking photos of the spatial patterns masked from UV light. The image sensor would play a significant role in UV photography, which has important applications in astronomy, clinics, combustion detection and art.

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
Silicon carbide (SiC)
image sensor
ultraviolet (UV)
photodiode
high temperature
bipolar junction transistor (BJT)
transistor-transistor logic (TTL)

Shakir, MuhammadKTH,Integrerade komponenter och kretsar(Swepub:kth)u12pshtu (author)
Hellström, Per-Erik,1970-KTH,Elektronik och inbyggda system(Swepub:kth)u1wc1lgb (author)
Malm, B. Gunnar,1972-KTH,Integrerade komponenter och kretsar(Swepub:kth)u13lag9j (author)
Zetterling, Carl-Mikael,1966-KTH,Integrerade komponenter och kretsar(Swepub:kth)u15o61ns (author)
Östling, MikaelKTH,Elektronik och inbyggda system(Swepub:kth)u1u0kle4 (author)
KTHElektronik och inbyggda system (creator_code:org_t)

In:IEEE Journal of the Electron Devices Society: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC8:1, s. 116-1212168-6734

By the author/editor: Hou, Shuoben; Shakir, Muhammad; Hellström, Per-E ...; Malm, B. Gunnar, ...; Zetterling, Carl ...; Östling, Mikael

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