Sökning: WFRF:(Schröder Stephan 1979 ) >
Manufacture and cha...
Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications
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- Fan, Xuge (författare)
- KTH,Mikro- och nanosystemteknik
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- Smith, Anderson David (författare)
- KTH,Integrerade komponenter och kretsar
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- Forsberg, Fredrik, 1980- (författare)
- KTH,Mikro- och nanosystemteknik
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visa fler...
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- Wagner, Stefan (författare)
- Rhein Westfal TH Aachen, Fac Elect Engn & Informat Technol, Otto Blumenthal Str 25, D-52074 Aachen, Germany.
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- Schröder, Stephan, 1979- (författare)
- KTH,Mikro- och nanosystemteknik
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- Akbari, Sayedeh Shirin Afyouni (författare)
- Ecole Polytech Fed Lausanne, Adv NEMS Grp, CH-1015 Lausanne, Switzerland.
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- Fischer, Andreas C., 1982- (författare)
- KTH,Mikro- och nanosystemteknik,Silex Microsyst AB, S-17526 Järfälla, Sweden.
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- Villanueva, Luis Guillermo (författare)
- Ecole Polytech Fed Lausanne, Adv NEMS Grp, CH-1015 Lausanne, Switzerland.
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- Östling, Mikael (författare)
- KTH,Integrerade komponenter och kretsar
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- Lemme, Max C. (författare)
- Rhein Westfal TH Aachen, Fac Elect Engn & Informat Technol, Otto Blumenthal Str 25, D-52074 Aachen, Germany.;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumnethal Str 25, D-52074 Aachen, Germany.
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- Niklaus, Frank, 1971- (författare)
- KTH,Mikro- och nanosystemteknik
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(creator_code:org_t)
- 2020-04-20
- 2020
- Engelska.
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Ingår i: MICROSYSTEMS & NANOENGINEERING. - : NATURE PUBLISHING GROUP. - 2055-7434. ; 6:1
- Relaterad länk:
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https://doi.org/10.1...
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https://www.nature.c...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Graphene's unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 mu m to 110 mu m, and suspended proof masses consisting of solid silicon cubes that are from 5 mu mx5 mu mx16.4 mu m to 100 mu mx100 mu mx16.4 mu m in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were >90%, with >70% of the graphene membranes having >90% graphene area without visible defects. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The graphene membranes with suspended proof masses were extremely robust, and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to 7000nN. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.
Ämnesord
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
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Fan, Xuge
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Wagner, Stefan
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Akbari, Sayedeh ...
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Fischer, Andreas ...
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Villanueva, Luis ...
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Östling, Mikael
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Lemme, Max C.
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