Device with a waveguide supported on a substrate and method for its fabrication

• ABSTRACT A device (1) and a method for fabricating such a device is described. The device (1) comprises a device layer (4), a substrate (2) defining a substrate plane (3). A device layer plane (5) is defined on the side of the device layer (4) facing the substrate (2). The device also comprises a waveguide (7) for guiding an electromagnetic wave. The waveguide (7) is supported on the substrate (2) via a support structure (6) extending from the substrate (2) to the device layer (4). The ratio of the largest distance (D1), perpendicular to the substrate plane (3), between a free surface of the waveguide (7) facing the substrate and any solid material to the height (h) of the waveguide (7) is more than 6, i.e. D1/h \textgreater 6. The ratio of the distance (D2), perpendicular to the substrate plane (3), between the device layer plane (5) and the substrate plane (3) to the height (h) of the waveguide (7) is more than 6, i.e. D2/h \textgreater 6.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Publication and Content Type

pop (subject category)

pat (subject category)