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Nanoelectromechanical Sensors Based on Suspended 2D Materials

Lemme, Max C. (author)
Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.
Wagner, Stefan (author)
AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany.
Lee, Kangho (author)
Univ Bundeswehr Munchen, Fac Elect Engn & Informat Technol, Inst Phys, Werner Heisenberg Weg 39, D-85577 Neubiberg, Germany.
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Fan, Xuge (author)
KTH,Mikro- och nanosystemteknik
Verbiest, Gerard J. (author)
Delft Univ Technol, Dept Precis & Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands.
Wittmann, Sebastian (author)
Infineon Technol AG, Wernerwerkstr 2, D-93049 Regensburg, Germany.
Lukas, Sebastian (author)
Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany.
Dolleman, Robin J. (author)
Rhein Westfal TH Aachen, Inst Phys 2, Otto Blumenthal Str, D-52074 Aachen, Germany.
Niklaus, Frank, 1971- (author)
KTH,Mikro- och nanosystemteknik
van der Zant, Herre S. J. (author)
Delft Univ Technol, Kavli Inst Nanosci, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.
Duesberg, Georg S. (author)
Univ Bundeswehr Munchen, Fac Elect Engn & Informat Technol, Inst Phys, Werner Heisenberg Weg 39, D-85577 Neubiberg, Germany.
Steeneken, Peter G. (author)
Delft Univ Technol, Dept Precis & Microsyst Engn, Mekelweg 2, NL-2628 CD Delft, Netherlands.;Delft Univ Technol, Kavli Inst Nanosci, Lorentzweg 1, NL-2628 CJ Delft, Netherlands.
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Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 2, D-52074 Aachen, Germany;AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany. AMO GmbH, Adv Microelect Ctr Aachen AMICA, Otto Blumenthal Str 25, D-52074 Aachen, Germany. (creator_code:org_t)
AMER ASSOC ADVANCEMENT SCIENCE, 2020
2020
English.
In: RESEARCH. - : AMER ASSOC ADVANCEMENT SCIENCE. - 2639-5274. ; 2020
Related links:
https://doi.org/10.3...
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https://urn.kb.se/re...
https://doi.org/10.3...
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  • Research review (peer-reviewed)
Abstract Subject headings
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  • The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

Subject headings

NATURVETENSKAP  -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
NATURAL SCIENCES  -- Physical Sciences -- Condensed Matter Physics (hsv//eng)

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