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Influence of pulse ...
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Lundin, DanielUniversity of Paris 11, France
(författare)
Influence of pulse power amplitude on plasma properties and film deposition in high power pulsed plasma enhanced chemical vapor deposition
- Artikel/kapitelEngelska2014
Förlag, utgivningsår, omfång ...
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American Vacuum Society,2014
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electronicrdacarrier
Nummerbeteckningar
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LIBRIS-ID:oai:DiVA.org:liu-107122
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-107122URI
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https://doi.org/10.1116/1.4867442DOI
Kompletterande språkuppgifter
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Språk:engelska
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Sammanfattning på:engelska
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Klassifikation
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Ämneskategori:ref swepub-contenttype
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Ämneskategori:art swepub-publicationtype
Anmärkningar
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The discharge characteristics in high power pulsed plasma enhanced chemical vapor deposition is studied with the aim to characterize the impact of high power pulses (HiPP). Using a power scheme of combined HiPP and direct current (DC) to ignite the plasma discharge, and adjusting the HiPP/DC time-averaged power ratio while keeping the total power constant, the effect of the high power pulses was isolated from the total power. By monitoring the discharge current along with the optical emission from the plasma, it is found that the amount of available ions increased with increasing HiPP/DC ratio, which indicates a higher plasma density. Using carbon films deposited from acetylene in an argon plasma as model system, a strong increase in deposition rate with higher HiPP/DC is observed. The increased deposition rate is ascribed to a more efficient plasma chemistry generated by the denser plasma.
Ämnesord och genrebeteckningar
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TECHNOLOGY
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TEKNIKVETENSKAP
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Jensen, JensLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)jenje80
(författare)
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Pedersen, HenrikLinköpings universitet,Kemi,Tekniska högskolan(Swepub:liu)henpe50
(författare)
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University of Paris 11, FranceTunnfilmsfysik
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films: American Vacuum Society32:30734-21011520-8559
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