id:"swepub:oai:DiVA.org:kth-32466"
Search: id:"swepub:oai:DiVA.org:kth-32466" > Comparative study o...
- 1 of 1
- Previous record
- Next record
- To hitlist
- Esteve, RomainKTH,Integrerade komponenter och kretsar (author)
Comparative study of thermal oxides and post-oxidized depositedoxides on n-type free standing 3C-SiC
- Article/chapterEnglish2010
Publisher, publication year, extent ...
- 2010
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-32466
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-32466URI
- https://doi.org/10.4028/www.scientific.net/MSF.645-648.829DOI
Supplementary language notes
- Language:English
- Summary in:English
Part of subdatabase
- SwePubSwePub
Classification
Notes
- QC 20110414
- The electrical properties of oxides fabricated on n-type 3C-SiC (001) using wet oxidationand an advanced oxidation process combining SiO 2 deposition with rapid post oxidation steps havebeen compared. Two alternative SiO 2 deposition techniques have been studied: the plasmaenhanced chemical vapor deposition (PECVD) and the low pressure chemical vapor deposition(LPCVD). The post-oxidized PECVD oxide is been demonstrated to be beneficial in terms ofinterface traps density and reliability.
Subject headings and genre
- 3C-SiC
- MOS capacitors
- oxide deposition
- post-oxidation
- interface traps
- TZDB.
- TECHNOLOGY
- TEKNIKVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
- Schöner, A. (author)
- Reshanov, S.A. (author)
- Zetterling, Carl-MikaelKTH,Integrerade komponenter och kretsar(Swepub:kth)u15o61ns (author)
- KTHIntegrerade komponenter och kretsar (creator_code:org_t)
Related titles
- In:Materials Science Forum645-648, s. 829-8320255-54761662-9752
Internet link
Find in a library
- Materials Science Forum (Search for host publication in LIBRIS)
To the university's database
- 1 of 1
- Previous record
- Next record
- To hitlist
Find more in SwePub
- By the author/editor
- Esteve, Romain
- Schöner, A.
- Reshanov, S.A.
- Zetterling, Carl ...
- Articles in the publication
- Materials Scienc ...
- By the university
- Royal Institute of Technology
Search outside SwePub
- Extend your search to:
- Google Book Search
- Google Scholar
Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.
- Copyright © LIBRIS - National Library Systems
- LIBRIS.kb.se
