Influence of thermal annealing and of the substrate on sputter-deposited thin films from EUROFER97 on tungsten

• The modification of sputter-deposited films from EUROFER97 on tungsten during and after annealing were investigated in-situ and ex-situ. The annealing resulted in a densification of the film, formation of large grains, segregation of W at the surface, and the formation of Fe-W compounds at the interfacial region. Similar structural modifications were observed also for a film annealed on a MgO substrate, with an exception to the change in composition (no increase of W concentration). Results indicate that the substrate significantly affects thermally induced modifications of re-deposited EUROFER97.

Ämnesord

NATURVETENSKAP  -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)

TEKNIK OCH TEKNOLOGIER  -- Materialteknik -- Annan materialteknik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Materials Engineering -- Other Materials Engineering (hsv//eng)

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