Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process

QC 20231113
Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to implement ultra-low power logic circuits, due to their abrupt turn-off characteristics and zero off-state leakage. Further, realizing circuits with 4-terminal (4-T) NEM relays enables significant reduction in circuit device count compared to conventional transistor circuits. For practical 4-T NEM circuits, however, the relays need to be miniaturized and integrated with high-density back-end-of-line (BEOL) interconnects, which is challenging and has not been realized to date. Here, we present electrostatically actuated silicon 4-T NEM relays that are integrated with multi-layer BEOL metal interconnects, implemented using a commercial silicon-on-insulator (SOI) foundry process. We demonstrate 4-T switching and the use of body-biasing to reduce pull-in voltage of a relay with a 300 nm airgap, from 15.8 V to 7.8 V, consistent with predictions of the finite-element model. Our 4-T NEM relay technology enables new possibilities for realizing NEM-based circuits for applications demanding harsh environment computation and zero standby power, in industries such as automotive, Internet-of-Things, and aerospace.

Worsey, ElliotUniversity of Bristol, BS8 1UB Bristol, UK (författare)
Bleiker, Simon J.KTH,Mikro- och nanosystemteknik(Swepub:kth)u13ksi31 (författare)
Edinger, PierreKTH,Mikro- och nanosystemteknik(Swepub:kth)u14pk7iz (författare)
Kulsreshath, MukeshUniversity of Bristol, BS8 1UB Bristol, UK (författare)
Tang, QiUniversity of Bristol, BS8 1UB Bristol, UK (författare)
Takabayashi, AlainÉcole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland (författare)
Quack, NielsÉcole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland (författare)
Verheyen, PeterIMEC, 3001 Leuven, Belgium (författare)
Bogaerts, WimIMEC, 3001 Leuven, Belgium; Ghent University, 9052 Gent, Belgium (författare)
Gylfason, Kristinn,1978-KTH,Mikro- och nanosystemteknik(Swepub:kth)u1v3y7u7 (författare)
Pamunuwa, DineshUniversity of Bristol, BS8 1UB Bristol, UK (författare)
Niklaus, Frank,1971-KTH,Mikro- och nanosystemteknik(Swepub:kth)u1bcu8r2 (författare)
KTHMikro- och nanosystemteknik (creator_code:org_t)

Av författaren/redakt...: Li, Yingying, 19 ...; Worsey, Elliot; Bleiker, Simon J ...; Edinger, Pierre; Kulsreshath, Muk ...; Tang, Qi; visa fler...; Takabayashi, Ala ...; Quack, Niels; Verheyen, Peter; Bogaerts, Wim; Gylfason, Kristi ...; Pamunuwa, Dinesh; Niklaus, Frank, ...; visa färre...

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.