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Field reversal in l...
Field reversal in low pressure, unmagnetized radio frequency capacitively coupled argon plasma discharges
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- Wen, De Qi (författare)
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA; Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA
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- Krek, Janez (författare)
- Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA
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- Gudmundsson, Jon Tomas, 1965- (författare)
- KTH,Rymd- och plasmafysik,Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland
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- Kawamura, Emi (författare)
- Department of Electrical Engineering and Computer Sciences—1770, University of California, Berkeley, California 94720, USA
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- Lieberman, Michael A. (författare)
- Department of Electrical Engineering and Computer Sciences—1770, University of California, Berkeley, California 94720, USA
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- Zhang, Peng (författare)
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA
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- Verboncoeur, John P. (författare)
- Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, USA; Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, USA
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(creator_code:org_t)
- AIP Publishing, 2023
- 2023
- Engelska.
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Ingår i: Applied Physics Letters. - : AIP Publishing. - 0003-6951 .- 1077-3118. ; 123:26
- Relaterad länk:
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https://doi.org/10.1...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- In general, the radio frequency (rf) electric field within a sheath points toward the metal electrode in low pressure, unmagnetized rf electropositive capacitively coupled plasma (CCP) glow discharges. This is due to the large ratio of electron to ion mobility and the formation of an ion sheath. In this work, we studied, using fully kinetic particle-in-cell simulations, a reversed electric field induced by the strong secondary electron emission during the phase of sheath collapse in a high-voltage rf-driven low pressure CCP glow discharge. We explored the transition behavior of the formation of field reversal as a function of driving voltage amplitude and found that field reversal starts to form at around 750 V, for a discharge with an electrode spacing of 4 cm at 10 mTorr argon pressure driven at 13.56 MHz. Accordingly, the energy distribution function of electrons incident on the electrode shows peaks from around 3 to 10 eV while varying the driving voltage from 150 to 2000 V, showing potentially beneficial effects in plasma material processing where relatively directional electrons are preferred to solely thermal diffusion electrons.
Ämnesord
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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