Sökning: (L773:1558 4542 OR L773:1077 260X) srt2:(2010-2014) >
Wafer-Level Heterog...
Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS
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- Lapisa, Martin (författare)
- KTH,Mikrosystemteknik
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- Stemme, Goran (författare)
- KTH,Mikrosystemteknik
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- Niklaus, Frank (författare)
- KTH,Mikrosystemteknik
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(creator_code:org_t)
- 2011
- 2011
- Engelska.
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Ingår i: IEEE Journal of Selected Topics in Quantum Electronics. - 1077-260X .- 1558-4542. ; 17:3, s. 629-644
- Relaterad länk:
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https://urn.kb.se/re...
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visa fler...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Wafer-level heterogeneous integration technologies for microoptoelectromechanical systems (MOEMS), microelectromechanical systems (MEMS), and nanoelectromechanical systems (NEMS) enable the combination of dissimilar classes of materials and components into single systems. Thus, high-performance materials and subsystems can be combined in ways that would otherwise not be possible, and thereby forming complex and highly integrated micro-or nanosystems. Examples include the integration of high-performance optical, electrical or mechanical materials such as monocrystalline silicon, graphene or III-V materials with integrated electronic circuits. In this paper the state-of-the-art of wafer-level heterogeneous integration technologies suitable for MOEMS, MEMS, and NEMS devices are reviewed. Various heterogeneous MOEMS, MEMS, and NEMS devices that have been described in literature are presented.
Ämnesord
- NATURVETENSKAP -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)
- TEKNIK OCH TEKNOLOGIER -- Elektroteknik och elektronik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)
Nyckelord
- Microelectromechanical system (MEMS)
- microoptoelectromechanical system (MOEMS)
- More-than-Moore
- nanoelectromechanical system (NEMS)
- photonic integration
- self-assembly
- wafer-level heterogeneous integration
- Optics
- Optik
- Electrical engineering, electronics and photonics
- Elektroteknik, elektronik och fotonik
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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