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Monolithic Bidirect...
Monolithic Bidirectional Switch (MBS) - A novel MOS-based power device
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Baus, M (author)
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Ali, M Z (author)
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Winkler, O (author)
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Spangenberg, B (author)
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- Lemme, Max C., 1970- (author)
- AMO GmbH, AMICA, Aachen, Germany
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Kurz, H (author)
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(creator_code:org_t)
- 2005
- 2005
- English.
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In: PROCEEDINGS OF ESSDERC 2005. - 0780392035 ; , s. 473-476
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- A novel MOS-based power device, the Monolithic Bidirectional Switch (MBS), is investigated in this work. An analytical model is used to explain basic device operating principles. A self-aligned fabrication process of lateral MBS devices with Schottky contacts and local oxidation of silicon technique (LOCOS) is described. Experimental results are compared with the analytical model to analyze the influence of device parasitics. Bidirectional switching and an on/off-current ratio of more than 100 is demonstrated for MBS devices for the first time.
Subject headings
- TEKNIK OCH TEKNOLOGIER -- Nanoteknik (hsv//swe)
- ENGINEERING AND TECHNOLOGY -- Nano-technology (hsv//eng)
Keyword
- Electric currents
- MOS devices
- Schottky barrier diodes
- Switching circuits
Publication and Content Type
- ref (subject category)
- kon (subject category)
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