POLYSILICON MESOSCOPIC WIRES COATED BY Pd AS H(2) SENSORS

QC 20120216
In this work a novel monocrystalline silicon nanowires array has been investigated and presented as hydrogen sensor, designed and fabricated by employing high resolution microfabrication techniques and featuring a high surface/volume ratio. The nanowires arrays makes up the channel of a MOS system, palladium-silicon dioxide-silicon. Several devices have been fabricated by using a SOI (Silicon On Insulator) substrate, Source and Drain have been geometrically patterned by optical lithography and Boron p-doped. Electron Beam Litography (EBL) defined the MOS channel made up of a nanowires array of different length and width in different transistors. The pads of Source and Drain have been manufactured with an aluminium film deposition. The Gate has been fabricated with a grown silicon oxide layer (17.4 nm) and Palladium has been used as gate contact. Polarizing and exposing the device to H(2)/N(2) cycles at different concentrations some preliminary measurements have been successfully conducted.

Cannata, D. (författare)
Di Pietrantonio, F. (författare)
Verona, E. (författare)
Di Natale, C. (författare)
D'Amico, A. (författare)
Paletti, S. (författare)
Lemme, Max C.,1970-AMO GmbH, AMICA, Aachen, Germany(Swepub:kth)u1m2eozy (författare)
Tibuzzi, A. (författare)
Margesin, B. (författare)
Soncini, G. (författare)
Betta, G. F. Dalla (författare)
AMO GmbH, AMICA, Aachen, Germany (creator_code:org_t)

Ingår i:PROCEEDINGS OF THE 13TH ITALIAN CONFERENCE ON SENSORS AND MICROSYSTEMSSINGAPORE : WORLD SCIENTIFIC PUBL CO PTE LTD, s. 161-165

Av författaren/redakt...: Benetti, M.; Cannata, D.; Di Pietrantonio, ...; Verona, E.; Di Natale, C.; D'Amico, A.; visa fler...; Paletti, S.; Lemme, Max C., 1 ...; Tibuzzi, A.; Margesin, B.; Soncini, G.; Betta, G. F. Dal ...; visa färre...

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