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- Ferraro, P. (author)
Surface topography of microstructures in lithium niobate by digital holographic microscopy
- Article/chapterEnglish2004
Publisher, publication year, extent ...
- 2004-04-21
- IOP Publishing,2004
- printrdacarrier
Numbers
- LIBRIS-ID:oai:DiVA.org:kth-5824
- https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-5824URI
- https://doi.org/10.1088/0957-0233/15/5/026DOI
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- Language:English
- Summary in:English
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- QC 20100824
- We report here on the application of digital holographic microscopy as a metrological tool for the inspection and the micro-topography reconstruction of different microstructures fabricated in bulk lithium niobate by differential etching of reversed ferroelectric domain patterned crystals. These structures have a range of applications in optical ridge waveguides, alignment structures, V-grooves, micro-tips and micro-cantilever beams and precise control of the surface quality and topography is required. The technique allows us to obtain digitally a high-fidelity surface topography description of the specimen with only one image acquisition allowing us to have relatively simple and compact set-ups able to give quantitative information on object morphology. The advantages of this technique compared to traditional microscopy are discussed.
Subject headings and genre
- NATURVETENSKAP Fysik Atom- och molekylfysik och optik hsv//swe
- NATURAL SCIENCES Physical Sciences Atom and Molecular Physics and Optics hsv//eng
- digital holography; microscopy; lithium niobate; microstructures
- Optical physics
- Optisk fysik
Added entries (persons, corporate bodies, meetings, titles ...)
- Grilli, Simonetta (author)
- Finizio, A. (author)
- Coppola, G. (author)
- Iodice, M. (author)
- Chiarini, M. (author)
- De Nicola, S. (author)
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- In:Measument science and technology15: IOP Publishing15:5, s. 961-0957-02331361-6501
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