Sökning: onr:"swepub:oai:DiVA.org:kth-5982" >
Nano-fabrication of...
-
Holmberg, AndersKTH,Fysik
(författare)
Nano-fabrication of condenser and micro zone plates for compact X-ray microscopy
- Artikel/kapitelEngelska2004
Förlag, utgivningsår, omfång ...
Nummerbeteckningar
-
LIBRIS-ID:oai:DiVA.org:kth-5982
-
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-5982URI
-
https://doi.org/10.1016/j.mee.2004.03.006DOI
Kompletterande språkuppgifter
-
Språk:engelska
-
Sammanfattning på:engelska
Ingår i deldatabas
Klassifikation
-
Ämneskategori:ref swepub-contenttype
-
Ämneskategori:art swepub-publicationtype
Anmärkningar
-
QC 20100616, QC 20111017. 29th International Conference on Micro and Nano Engineering (MNE 2003), Cambridge, ENGLAND, SEP 22-25, 2003
-
We demonstrate nano-fabrication of high-aspect ratio and high-spatial frequency diffractive X-ray optics with high uniformity for use in a laser-plasma-based compact water-window X-ray microscope. The structures are fabricated on 50 nm thin Si3N4-membranes using a three-layer resist scheme and 30 keV e-beam lithography in combination with reactive ion etching and nickel electroplating. The process is developed on solely commercially available resists and instruments. As examples, we demonstrate fabrication of micro-zone plates with outermost linewidths of 30 nm and an uniform zone height of 160 nm, and a 4.5 mm diameter condenser zone plate with 50-60 nm lines, fabricated by using stitched fields.
Ämnesord och genrebeteckningar
Biuppslag (personer, institutioner, konferenser, titlar ...)
-
Rehbein, StefanKTH,Fysik(Swepub:kth)u1lmm9pi
(författare)
-
Hertz, Hans M.KTH,Fysik(Swepub:kth)u10uiefj
(författare)
-
KTHFysik
(creator_code:org_t)
Sammanhörande titlar
-
Ingår i:Microelectronic Engineering73/74, s. 639-6430167-93171873-5568
Internetlänk
Hitta via bibliotek
Till lärosätets databas