Nitride formation and dangling-bond passivation on Si(111)-(7x7) with NH3

• Thermal nitridation of the Si(111)-(7 x 7) reconstructed surface with ammonia has been investigated using scanning tunneling microscopy (STM). True nitride formation in the form of ring-like structures as in stoichiometric silicon nitride (Si3N4) was observed at imperfections on the surface, which otherwise preserved the characteristics of the (7 x 7) reconstruction. However, the ratio of reacted adatoms in the reconstruction never exceeded similar to 50%, indicative of a frustrated saturation behavior for the adatom dangling bonds in the Si(111)-(7 x 7)-NH3 reaction system. (C) 1997 Elsevier Science B.V.

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