Study of optical characteristics of damage in oxygen-implanted 6H-SiC

↓ Direkt till sidans innehåll
↓ Direkt till sidans sekundära innehåll (sidomenyn)

Search: id:"swepub:oai:DiVA.org:kth-85414" > Study of optical ch...

1 of 1
Previous record
Next record
To hitlist

Details
MARC

Wang, L. (author)

Study of optical characteristics of damage in oxygen-implanted 6H-SiC

Article/chapterEnglish1999

Publisher, publication year, extent ...

1999
printrdacarrier

Numbers

LIBRIS-ID:oai:DiVA.org:kth-85414
https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-85414URI
https://doi.org/10.1023/A:1006627610829DOI

Supplementary language notes

Language:English
Summary in:English

Part of subdatabase

SwePubSwePub

Classification

Subject category:ref swepub-contenttype
Subject category:art swepub-publicationtype

Notes

References: MÃŒller, G., KrÃ¶tz, G., Niemann, E., (1994) Sensors and Actuators A, 43, p. 259; Brown, D.M., Downey, E., Grezzo, M., Kretchmer, J., Krishnamrthy, V., Hennessy, W., Michon, G., (1996) Solid State Electronics, 59, p. 1531; Wesch, W., (1996) Beam Interactions with Materials and Atoms, 116, p. 305; Kimoto, T., Nakajima, T., Matsunami, H., Nakata, T., Inoue, M., (1996) Appl. Phys. Lett., 69, p. 1113; Nadella, R.K., Capano, M.A., (1997) Appl. Phys. Lett., 70, p. 886; Alok, D., Baliga, B.J., (1997) J. Electrochem. Soc., 144, p. 1135; Alok, D., Baliga, B.J., (1997) J. Electrochem. Soc., 26, p. 134; Grimaldi, M.G., Calcagno, L., Musumeci, P., Frangis, N., Van Landuyt, J., (1997) J. Appl. Phys., 81, p. 7181; Ninomiya, S., Adachi, S., (1994) Jpn. J. Appl. Phys., 33, p. 2479; Capelletti, R., Miotello, A., Ossi, P.M., (1997) J. Appl. Phys., 81, p. 146; Musumeci, P., Calcagno, L., Grimaldi, M.G., Foti, G., (1996) Appl. Phys. Lett., 69, p. 468; Laine, A.D., Mezzasalma, A.M., Rizzo, S., Mondio, G., (1996) Beam Interactions with Materials and Atoms, 116, p. 338 NR 20140805
Oxygen ions, with an energy of 70 keV, and doses ranging from 5Ã—1013 to 5Ã—1015 cm-2, were implanted into 6H SiC. The damage energies were calculated as 0.93-93 eV/atom with the doses respectively. The dielectric function obtained from spectroscopic ellipsometry were quite sensitive to ion irradiation of the surface, while the first order Raman spectroscopy decreased in intensity with increasing O+ ion dose. The damage behavior characterized by optical measurements was in good agreement with characterization by Rutherford backscattering spectrometry and channeling and atomic force microscopy.

Subject headings and genre

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Annan elektroteknik och elektronik hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Other Electrical Engineering, Electronic Engineering, Information Engineering hsv//eng
Atomic force microscopy
Carrier concentration
Doping (additives)
Energy gap
Ion implantation
Light absorption
Nanostructured materials
Oxidation
Oxygen
Point defects
Radiation damage
Rutherford backscattering spectroscopy
Elastic damage energy
Spectroscopic ellipsometry
Silicon carbide

Added entries (persons, corporate bodies, meetings, titles ...)

Huang, J. (author)
Lin, C. (author)
Zou, S. (author)
Zheng, Y. (author)
Wang, X. (author)
Huang, D. (author)
Zetterling, Carl-MikaelKTH,Integrerade komponenter och kretsar(Swepub:kth)u15o61ns (author)
Östling, MikaelKTH,Integrerade komponenter och kretsar(Swepub:kth)u1u0kle4 (author)
KTHIntegrerade komponenter och kretsar (creator_code:org_t)

Related titles

In:Journal of materials science letters18:12, s. 979-9820261-80281573-4811

Internet link

Find in a library

Journal of materials science letters (Search for host publication in LIBRIS)

To the university's database

1 of 1
Previous record
Next record
To hitlist

Find more in SwePub

By the author/editor: Wang, L.; Huang, J.; Lin, C.; Zou, S.; Zheng, Y.; Wang, X.; show more...; Huang, D.; Zetterling, Carl ...; Östling, Mikael; show less...

About the subject

ENGINEERING AND TECHNOLOGY: ENGINEERING AND ...; and Electrical Engin ...; and Other Electrical ...

Articles in the publication: Journal of mater ...

By the university: Royal Institute of Technology

Search outside SwePub

Extend your search to:: Google; Google Book Search; Google Scholar

Kungliga biblioteket hanterar dina personuppgifter i enlighet med EU:s dataskyddsförordning (2018), GDPR. Läs mer om hur det funkar här.
Så här hanterar KB dina uppgifter vid användning av denna tjänst.

LIBRIS.kb.se