Extrinsic base design of SiC bipolar transistors

• The SiC npn bipolar junction transistor (BJT) is a very promising device for high voltage and high power switches. The SiC BJT has, due to junction voltage cancellation, potentially a low on-resistance. However, the high resistivity in the base layer can induce a locally forward biased base collector junction and a premature current from the base to collector at on-state. In this work we propose a new technique to fabricate the extrinsic base using regrowth of the extrinsic base layer. This technique can put the highly doped region of the extrinsic base a few tenths of a micron from the intrinsic region. We also propose a new mobility model in our simulations to correctly account for the ionized impurities in minority carrier transport and elevated temperature.

Subject headings

TEKNIK OCH TEKNOLOGIER  -- Elektroteknik och elektronik -- Annan elektroteknik och elektronik (hsv//swe)

ENGINEERING AND TECHNOLOGY  -- Electrical Engineering, Electronic Engineering, Information Engineering -- Other Electrical Engineering, Electronic Engineering, Information Engineering (hsv//eng)

Keyword

Bipolar transistors

Mobility

Regrowth

Collector junctions

Junction voltage

Premature current

Charge carriers

Concentration (process)

Electric conductivity

Electric potential

Electric resistance

Electron mobility

Ionization

Product design

Silicon carbide

Temperature control

Publication and Content Type

ref (subject category)

art (subject category)