High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers

QC 20120220
Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of table-top zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.

Brewer, C. (author)
Fernandez, S. (author)
Martz, DaleNSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University(Swepub:kth)u1klqg55 (author)
Marconi, M. (author)
Chao, W. (author)
Anderson, E. H. (author)
Vinogradov, A. V. (author)
Artyukov, I. A. (author)
Ponomareko, A. G. (author)
Kondratenko, V. V. (author)
Attwood, D. T. (author)
Bertness, K. A. (author)
Sanford, N. A. (author)
Rocca, J. J. (author)
Menonil, C. S. (author)
NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University (creator_code:org_t)

By the author/editor: Brizuela, F.; Brewer, C.; Fernandez, S.; Martz, Dale; Marconi, M.; Chao, W.; show more...; Anderson, E. H.; Vinogradov, A. V ...; Artyukov, I. A.; Ponomareko, A. G ...; Kondratenko, V. ...; Attwood, D. T.; Bertness, K. A.; Sanford, N. A.; Rocca, J. J.; Menonil, C. S.; show less...

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