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High resolution ful...
High resolution full-field imaging of nanostructures using compact extreme ultraviolet lasers
- Article/chapterEnglish2009
Publisher, publication year, extent ...
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2009-09-25
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IOP Publishing,2009
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printrdacarrier
Numbers
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LIBRIS-ID:oai:DiVA.org:kth-86185
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https://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-86185URI
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https://doi.org/10.1088/1742-6596/186/1/012026DOI
Supplementary language notes
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Language:English
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Summary in:English
Part of subdatabase
Classification
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Subject category:ref swepub-contenttype
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Subject category:kon swepub-publicationtype
Notes
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QC 20120220
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Recent advances in the development of high peak brightness table-top extreme ultraviolet (EUV) and soft x-ray (SRX) lasers have opened new opportunities for the demonstration of compact full-field EUV/SXR microscopes capable of capturing images with short exposures down to a single laser shot. We demonstrate the practical application of table-top zone plate EUV microscopes that can image nanostructures with a spatial resolution of 54 nm and below and exposure times as short as 1.2 ns, the duration of a single laser shot.
Subject headings and genre
Added entries (persons, corporate bodies, meetings, titles ...)
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Brewer, C.
(author)
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Fernandez, S.
(author)
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Martz, DaleNSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University(Swepub:kth)u1klqg55
(author)
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Marconi, M.
(author)
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Chao, W.
(author)
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Anderson, E. H.
(author)
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Vinogradov, A. V.
(author)
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Artyukov, I. A.
(author)
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Ponomareko, A. G.
(author)
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Kondratenko, V. V.
(author)
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Attwood, D. T.
(author)
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Bertness, K. A.
(author)
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Sanford, N. A.
(author)
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Rocca, J. J.
(author)
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Menonil, C. S.
(author)
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NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University
(creator_code:org_t)
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In:9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY: IOP Publishing
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