High spatial resolution full-field microscopy using a desktop-size soft x-ray laser

Conference on Soft X-Ray Lasers and Applications VII, San Diego, CA, AUG 29-30, 2007. QC 20120306
Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hv = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.

Brizuela, Fernando (författare)
Martz, DaleNSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University(Swepub:kth)u1klqg55 (författare)
Vaschenko, Georgiy (författare)
Marconi, Mario C. (författare)
Chao, Weilun (författare)
Anderson, Erik H. (författare)
Attwood, David T. (författare)
Vinogradov, Alexander V. (författare)
Artioukov, Igor A. (författare)
Pershyn, Yuriy P. (författare)
Kondratenko, Valeriy V. (författare)
Rocca, Jorge J. (författare)
Menoni, Carmen S. (författare)
NSF ERC for Extreme Ultraviolet Science and Technology, Department of Electrical and Computer Engineering, Colorado State University (creator_code:org_t)

Av författaren/redakt...: Brewer, Courtney ...; Brizuela, Fernan ...; Martz, Dale; Vaschenko, Georg ...; Marconi, Mario C ...; Chao, Weilun; visa fler...; Anderson, Erik H ...; Attwood, David T ...; Vinogradov, Alex ...; Artioukov, Igor ...; Pershyn, Yuriy P ...; Kondratenko, Val ...; Rocca, Jorge J.; Menoni, Carmen S ...; visa färre...

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