Molecular-dynamics studies of defect generation in epitaxial Mo/W superlattices

• An investigation of defect generation at the interface during growth of epitaxial (100) oriented Mo/W superlattices by ion-assisted deposition has been carried out using molecular-dynamics simulations. The influence of the impact parameter within the irreducible bcc unit cell [001] surface and the incident ion energy on the energy accommodation, the dynamics of energy transfer, and energy dissipation are discussed. A detailed model of the generation of point defects is presented and the influence of materials upon the type and the number of defects as well as the energy accommodation of the superlattice is revealed. It is shown that the behavior of the superlattice as a whole is largely dominated by the material in the surface monolayer.

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