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V0.5Mo0.5Nx/MgO(001...
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Kindlund, HannaLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan
(author)
V0.5Mo0.5Nx/MgO(001) layers grown at 100-900 °C : composition, nanostructure, and mechanical properties
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LIBRIS-ID:oai:DiVA.org:liu-106352
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-106352URI
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Language:English
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Summary in:English
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Subject category:vet swepub-contenttype
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Subject category:ovr swepub-publicationtype
Notes
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V0.5Mo0.5Nx/MgO(001) alloys with the B1-NaCl structure are grown by ultra-highvacuum reactive magnetron sputter deposition in 5 mTorr mixed Ar/N2 atmospheres at temperatures Ts which are varied from 100 and 900 °C. Alloy films grown at Ts ≤ 500 °C are polycrystalline with a strong 002 texture; layers grown at Ts ≤ 700 °C are epitaxial single-crystals. The N/Me ratio x ranges from 0.64±0.05 with Ts = 900 °C to 0.94±0.05 at 700 °C to 1.02±0.05 with Ts = 500 to 100 °C. The N loss at higher growth temperatures leads to a corresponding decrease in the relaxed lattice parameter ao from 4.212 Å with x = 1.02 to 4.175 Å with x = 0.94 to 4.121 Å with x = 0.64. V0.5Mo0.5Nx nanoindentation hardnesses H and elastic moduli E increase with increasing Ts from 17±3 GPa and 274±31 GPa at 100 °C to 26±1 GPa and 303±10 GPa at 900 °C. Films deposited at higher Ts also exhibit enhanced wear resistance. Scanning electron micrographs of nanoindents performed in single-crystal V0.5Mo0.5Nx films and films deposited at 100 and 300 °C reveal no evidence of cracking; instead they exhibit material pile-up around the indents characteristic of plastic flow in ductile materials. Valence band x-ray photoelectron spectroscopy analyses show an enhanced volume density of the shear sensitive d-t2g – d-t2g metallic states in V0.5Mo0.5Nx compared to VN and the density of these orbitals increases with increasing deposition temperature, i.e., the metallic states become more populated with the introduction of N vacancies.
Subject headings and genre
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NATURAL SCIENCES
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NATURVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
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Greczynski, GrzegorzLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)grzgr49
(author)
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Broitman, EstebanLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)broes27
(author)
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Martínez-de-Olcoz, L.Grupo de Capas Finas e Ingeniería de Superficies, Facultad de Física. Universidad de Barcelona. Dep. Física Aplicada y Óptica, Barcelona, Spain
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Lu, JunLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)junlu07
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Jensen, JensLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)jenje80
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Petrov, IvanLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan,Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA(Swepub:liu)ivape26
(author)
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Greene, JosephLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan,Department of Materials Science and the Fredrick Seitz Materials Research Laboratory, University of Illinois, Urbana, USA(Swepub:liu)josgr17
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Birch, JensLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)jenbi91
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Hultman, LarsLinköpings universitet,Tunnfilmsfysik,Tekniska högskolan(Swepub:liu)larhu75
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Linköpings universitetTunnfilmsfysik
(creator_code:org_t)
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