Trimethylboron as single-source precursor for boron-carbonthin film synthesis by plasma chemical vapor deposition

Imam, MewludeLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallat Source ESS AB, Sweden (author)

Boron-carbon (BxC) thin films are potential neutron converting layers for 10B-based neutron detectors. However, as common material choices for such detectors do not tolerate temperature above 500°C, a low temperature deposition route is required for this application. Here we study trimethylboron B(CH3)3 (TMB) as a single-source precursor for the deposition of BxC thin films by plasma CVD using Ar plasma. The effect of plasma power, TMB/Ar ratio and total pressure on the film composition, morphology and structure are investigated. The highest B/C ratio of 1.9 was achieved at high TMB flow in a low total pressure and high plasma power which rendered an approximate substrate temperature of ~ 300 °C. X-ray photoelectron spectroscopy shows that B-C bonds prevail in the films, although C-C and B-O bonds are also present. Raman spectroscopy confirms the presence of amorphous carbon phases in the films. The H content in the films is found to be 15±5 at. % by the time of flight elastic recoil detection analysis (Tof-ERDA). The film density as determined from X-ray reflectivity (XRR) measurements is 2. 16 ± 0.01 g/cm3 and the internal compressive stresses are measured to be less than 400 MPa.

Höglund, CarinaLinköpings universitet,Tekniska fakulteten,Tunnfilmsfysik,European Spallation Source ERIC, Lund, Sweden(Swepub:liu)carho79 (author)
Jensen, JensLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)jenje80 (author)
Schmidt, SusannLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,European Spallation Source ERIC, Lund, Sweden(Swepub:liu)sussc11 (author)
Ivanov, Ivan GueorguievLinköpings universitet,Halvledarmaterial,Tekniska fakulteten(Swepub:liu)ivaiv28 (author)
Hall-Wilton, RichardEuropean Spallation Source ERIC, Lund, Sweden (author)
Birch, JensLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)jenbi91 (author)
Pedersen, HenrikLinköpings universitet,Kemi,Tekniska fakulteten(Swepub:liu)henpe50 (author)
Linköpings universitetTunnfilmsfysik (creator_code:org_t)

By the author/editor: Imam, Mewlude; Höglund, Carina; Jensen, Jens; Schmidt, Susann; Ivanov, Ivan Gue ...; Hall-Wilton, Ric ...; show more...; Birch, Jens; Pedersen, Henrik; show less...

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