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Current-voltage-tim...
Current-voltage-time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge
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- Magnus, Fridrik (författare)
- Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland,Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland.
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- Tryggvason, Tryggvi K (författare)
- Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland,Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland.
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- Olafsson, Sveinn (författare)
- Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland,Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland.
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- Gudmundsson, Jon Tomas, 1965- (författare)
- Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland,Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland.;Shanghai Jiao Tong Univ, Univ Michigan Shanghai Jiao Tong Univ Joint Inst, Shanghai 200240, Peoples R China.
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Science Institute, University of Iceland, Dunhaga 3, IS-107 Reykjavik, Iceland Univ Iceland, Inst Sci, IS-107 Reykjavik, Iceland (creator_code:org_t)
- American Institute of Physics (AIP), 2012
- 2012
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 30:5
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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https://urn.kb.se/re...
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Abstract
Ämnesord
Stäng
- The discharge current–voltage–time waveforms are studied in the reactive Ar/O2 high power impulse magnetron sputtering discharge with a titanium target for 400 μs long pulses. The discharge current waveform is highly dependent on both the pulse repetition frequency and discharge voltage and the current increases with decreasing frequency or voltage. The authors attribute this to an increase in the secondary electron emission yield during the self-sputtering phase of the pulse, as an oxide forms on the target.
Ämnesord
- NATURVETENSKAP -- Fysik -- Fusion, plasma och rymdfysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Fusion, Plasma and Space Physics (hsv//eng)
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Publikations- och innehållstyp
- ref (ämneskategori)
- art (ämneskategori)
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