Influence of Post-Growth Annealing on the Defects Nature and Distribution in VLS Grown (111) 3C-SiC Layers

The current communication focuses on the influence of a post-growth annealing on the evolution of defects inside (111) 3C-SiC layers grown by the Vapour Liquid Solid (VLS) mechanism in SiGe melts on Si-face on- and off axis 6H-SiC substrates. The layers are studied by Transmission Electron Microscopy (TEM) and Low Temperature Photoluminescence (LTPL). It was found that the growth on off-axis substrates results in a 3C-SiC layer containing mainly stacking faults (SFs) and microtwins (MT). The density of MT lamellae and SFs reduces in the layers grown on the on-axis substrate compared to off-axis substrate. In the layers grown on off-axis substrates the annealing strongly reduces the density of SFs inclined to the 3C/6H-SiC interface. Additionally, 3C to 6H polytypic transformation appears only at the interface, most probably starting from substrate step edges. This was only seen on off-axis seed since the step edges are more.

Andreadou, A.Thessaloniki , Greece (författare)
Sun, JianWuGroupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France(Swepub:liu)jiasu75 (författare)
Lorenzzi, J.Villeurbanne; France (författare)
Mantzari, A.Thessaloniki , Greece (författare)
Zoulis, GeorgiosGroupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France (författare)
Jegenyes, NikolettaVilleurbanne; France (författare)
Juillaguet, SandrineGroupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France (författare)
Soulière, VeroniqueVilleurbanne; France (författare)
Ferro, G.Villeurbanne; France (författare)
Camassel, JeanGroupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France (författare)
Polychroniadis, Efstathios K.Thessaloniki , Greece (författare)
Thessaloniki , GreeceGroupe d’Etudes des Semiconducteurs, Université Montpellier 2 and CNRS, cc 074‐GES, 34095 Montpellier Cedex 5, France (creator_code:org_t)

Av författaren/redakt...: Marinova, Maya; Andreadou, A.; Sun, JianWu; Lorenzzi, J.; Mantzari, A.; Zoulis, Georgios; visa fler...; Jegenyes, Nikole ...; Juillaguet, Sand ...; Soulière, Veroni ...; Ferro, G.; Camassel, Jean; Polychroniadis, ...; visa färre...

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