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Ruthenium dioxide & Ru Nanoparticles for MISiCFET gas sensors
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- Salomonsson, Anette (author)
- Linköpings universitet,Tillämpad Fysik,Tekniska högskolan
- Roy, Somenath (author)
- Aulin, Christian (author)
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- (creator_code:org_t)
- 2005
- 2005
- English.
- In: Nanotech 2005 (NSTI) Anaheim, USA, 8-12 May. ; , s. 269–272-
- Conference paper (peer-reviewed)
Abstract
Subject headings
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- Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- kon (subject category)
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- Linköping University
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