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Structural and mech...
Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
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- Broitman, E. (author)
- Department of Applied Science, College of William and Mary, Williamsburg, VA 23187-8795, United States
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- Hellgren, N. (author)
- Frederick Seitz Materials Res. Lab., University of Illinois, Urbana, IL 61801, United States
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Czigany, Zs. (author)
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- Twesten, R.D. (author)
- Frederick Seitz Materials Res. Lab., University of Illinois, Urbana, IL 61801, United States
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- Luning, J. (author)
- Stanford Synchrotron Radiation Lab., Stanford, CA 94309, United States
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- Petrov, I. (author)
- Frederick Seitz Materials Res. Lab., University of Illinois, Urbana, IL 61801, United States
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- Hultman, Lars (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
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- Holloway, B.C. (author)
- Department of Applied Science, College of William and Mary, Williamsburg, VA 23187-8795, United States
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Department of Applied Science, College of William and Mary, Williamsburg, VA 23187-8795, United States Frederick Seitz Materials Res Lab., University of Illinois, Urbana, IL 61801, United States (creator_code:org_t)
- American Vacuum Society, 2003
- 2003
- English.
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In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Vacuum Society. - 0734-2101 .- 1520-8559. ; 21:4, s. 851-859
- Related links:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Subject headings
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- A systematic study of physical properties of sputter-deposited DLC films was performed as a function of flux ratio and ion energy. The energy and flux ions and neutral atoms impinging on the surface of the growing films were deduced from Langmuir probe measurements and theoretical calculations. The bombardment of growing films by the energetic particles led to changes in microstructure and mechanical properties. Results suggest that the presence of defective graphite formed by subplanted C and Ar atoms is the dominant influence on the mechanical properties of the DLC films.
Keyword
- TECHNOLOGY
- TEKNIKVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
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