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Gas rarefaction eff...
Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
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- Greczynski, Grzegorz, 1973- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Zhirkov, Igor, 1980- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Petrov, Ivan, 1949- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA
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- Greene, Joseph E, 1944- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA; University of Illinois, IL 61801 USA
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- Rosén, Johanna, 1975- (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- American Institute of Physics (AIP), 2017
- 2017
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : American Institute of Physics (AIP). - 0734-2101 .- 1520-8559. ; 35:6
- Relaterad länk:
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https://liu.diva-por... (primary) (Raw object)
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http://liu.diva-port...
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- The authors use energy- and time-dependent mass spectrometry to analyze the evolution of metal- and gas-ion fluxes incident at the substrate during high-power pulsed magnetron sputtering (HiPIMS) of groups IVb and VIb transition-metal (TM) targets in Ar. For all TMs, the time-and energy-integrated metal/gas-ion ratio at the substrate plane NMe+/NAr+ increases with increasing peak target current density J(T,peak) due to rarefaction. In addition, NMe+/NAr+ exhibits a strong dependence on metal/gas-atom mass ratio m(Me)/m(g) and varies from similar to 1 for Ti (m(Ti)/m(Ar) = 1.20) to similar to 100 for W (m(W)/m(Ar) = 4.60), with J(T,peak) maintained constant at 1 A/cm(2). Time-resolved ion-energy distribution functions confirm that the degree of rarefaction scales with m(Me)/m(g): for heavier TMs, the original sputtered-atom Sigmund-Thompson energy distributions are preserved long after the HiPIMS pulse, which is in distinct contrast to lighter metals for which the energy distributions collapse into a narrow thermalized peak. Hence, precise timing of synchronous substrate-bias pulses, applied in order to reduce film stress while increasing densification, is critical for metal/gas combinations with m(Me)/m(g) near unity, while with m(Me)/m(g) amp;gt;amp;gt; 1, the width of the synchronous bias pulse is essentially controlled by the metal-ion time of flight. The good agreement between results obtained in an industrial system employing 440 cm(2) cathodes and a laboratory-scale system with a 20 cm(2) target is indicative of the fundamental nature of the phenomena.
Ämnesord
- NATURVETENSKAP -- Fysik -- Den kondenserade materiens fysik (hsv//swe)
- NATURAL SCIENCES -- Physical Sciences -- Condensed Matter Physics (hsv//eng)
Nyckelord
- Time of flight mass spectrometry
- Metalloids
- Wave mechanics
- Physical vapor deposition
- Semiconductor device fabrication
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- art (ämneskategori)
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