Approach to high quality GaN lateral nanowires and planar cavities fabricated by focused ion beam and metal-organic vapor phase epitaxy

Pozina, GaliaLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten (författare)

Funding Agencies|Russian Science Foundation [16-12-10503]; H2020 project INDEED
We have developed a method to fabricate GaN planar nanowires and cavities by combination of Focused Ion Beam (FIB) patterning of the substrate followed by Metal Organic Vapor Phase Epitaxy (MOVPE). The method includes depositing a silicon nitride mask on a sapphire substrate, etching of the trenches in the mask by FIB with a diameter of 40 nm with subsequent MOVPE growth of GaN within trenches. It was observed that the growth rate of GaN is substantially increased due to enhanced bulk diffusion of the growth precursor therefore the model for analysis of the growth rate was developed. The GaN strips fabricated by this method demonstrate effective luminescence properties. The structures demonstrate enhancement of spontaneous emission via formation of Fabry-Perot modes.

Gubaydullin, Azat R.St Petersburg Acad Univ, Russia; ITMO Univ, Russia (författare)
Mitrofanov, Maxim I.Ioffe Inst, Russia; SHM RandE Ctr RAS, Russia (författare)
Kaliteevski, Mikhail A.St Petersburg Acad Univ, Russia; ITMO Univ, Russia; Ioffe Inst, Russia (författare)
Levitskii, Iaroslav V.Ioffe Inst, Russia; SHM RandE Ctr RAS, Russia (författare)
Voznyuk, Gleb V.ITMO Univ, Russia (författare)
Tatarinov, Evgeniy E.ITMO Univ, Russia (författare)
Evtikhiev, Vadim P.Ioffe Inst, Russia (författare)
Rodin, Sergey N.Ioffe Inst, Russia; SHM RandE Ctr RAS, Russia (författare)
Kaliteevskiy, Vasily N.Lappeenranta Univ Technol, Finland (författare)
Chechurin, Leonid S.Lappeenranta Univ Technol, Finland (författare)
Linköpings universitetTunnfilmsfysik (creator_code:org_t)

Av författaren/redakt...: Pozina, Galia; Gubaydullin, Aza ...; Mitrofanov, Maxi ...; Kaliteevski, Mik ...; Levitskii, Iaros ...; Voznyuk, Gleb V.; visa fler...; Tatarinov, Evgen ...; Evtikhiev, Vadim ...; Rodin, Sergey N.; Kaliteevskiy, Va ...; Chechurin, Leoni ...; visa färre...

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