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Growth and mechanic...
Growth and mechanical properties of 111-oriented V0.5Mo0.5Nx/Al2O3(0001) thin films
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- Kindlund, Hanna (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Lu, Jun (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Broitman, Esteban (författare)
- Linköpings universitet,Institutionen för fysik, kemi och biologi,Tekniska fakulteten
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- Petrov, Ivan (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Univ Illinois, IL 61801 USA
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- Greene, Joseph E (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Univ Illinois, IL 61801 USA
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- Birch, Jens (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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- Hultman, Lars (författare)
- Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten
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(creator_code:org_t)
- A V S AMER INST PHYSICS, 2018
- 2018
- Engelska.
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Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 36:5
- Relaterad länk:
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https://urn.kb.se/re...
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https://doi.org/10.1...
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Abstract
Ämnesord
Stäng
- Pseudobinary V0.5Mo0.5Nx(111) alloys with the Bl-NaCl crystal structure are grown on Al2O3(0001) substrates in an ultra-high-vacuum system by reactive magnetron sputter deposition in mixed Ar/N-2 atmospheres at temperatures T-s between 100 and 900 degrees C. Nitrogen-to-metal, N/(V + Mo), fractions x vary monotonically from 0.9 +/- 0.1 with T-s = 100 degrees C to 0.4 +/- 0.1 at T-s = 900 degrees C. Nitrogen loss at higher growth temperatures leads to a corresponding decrease in the relaxed lattice parameter a(o) from 4.21 +/- 0.01 angstrom at T-s = 300 degrees C to 4.125 +/- 0.005 angstrom with T-s = 900 degrees C. Scanning electron micrographs of cube-corner nanoindents extending into the substrate show that the films are relatively ductile, exhibiting material pile-up (plastic flow) around the indent edges. Nanoindentation hardnesses H and elastic moduli E, obtained using a calibrated Berkovich tip, of V0.5Mo0.5Nx(111) layers increase with increasing T-s(decreasing x) from 15 +/- 1 and 198 +/- 5 GPa at 100 degrees C to 23 +/- 2 and 381 +/- 11 GPa at 900 degrees C. These values are lower than the corresponding results obtained for the 001-oriented V0.5Mo0.5Nx films In addition, film wear resistance increases with increasing T-s, while the coefficient of friction, under 1000 mu N loads, is 0.09 +/- 0.01 for all layers. Published by the AVS.
Ämnesord
- NATURVETENSKAP -- Kemi -- Oorganisk kemi (hsv//swe)
- NATURAL SCIENCES -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
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