Deposition of MAX phase-containing thin films from a (Ti,Zr)(2)AlC compound target

• This work reports on sputter depositions carried out from a compound (Ti,Zr)(2)AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 degrees C. Short deposition times yielded 30-40 nm-thick Al-containing (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 degrees C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)(2)AlC and (Ti,Zr)(3)AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 degrees C) to form the MAX phases.

Ämnesord

NATURVETENSKAP  -- Kemi -- Oorganisk kemi (hsv//swe)

NATURAL SCIENCES  -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)

Nyckelord

Magnetron sputtering; Compound target; MAX phase solid solution; (TiZr)(2)AlC

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