Multisurface Interferometric Algorithm and Error Analysis With Adaptive Phase Shift Matching

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Chang, LinShanghai Univ, Peoples R China (författare)

Multisurface Interferometric Algorithm and Error Analysis With Adaptive Phase Shift Matching

Artikel/kapitelEngelska2022

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IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC,2022
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LIBRIS-ID:oai:DiVA.org:liu-183792
https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-183792URI
https://doi.org/10.1109/TIM.2021.3137160DOI

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Språk:engelska
Sammanfattning på:engelska

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Funding Agencies|National Natural Science Foundation of ChinaNational Natural Science Foundation of China (NSFC) [51775326]; National Science and Technology Major Project [2016YFF0101905]
To simultaneously measure topographies of both surfaces of a transparent plate through wavelength-tuning interferometry at arbitrary cavity lengths, a flexible phase shift matching algorithm (FPSMA) is proposed. The FPSMA includes two parts: 1) taking the four-term third-order Nuttall window as an example, a phase demodulation approach is designed and analyzed for extracting the harmonic phases of the front surface, rear surface, and thickness variation of the measured plate and 2) based on the residual error analysis of the developed 5N-Nuttall algorithm for different cavity length coefficients M and the phase-shifting parameters N , a parameter-change technique that allows the developed phase demodulation approach is applied to arbitrary cavity lengths by adaptively changing the phase shifts and frames of the captured interferograms. By this technique, the algorithm failures due to the spectral aliasing of harmonics can be avoided effectively and conveniently, and then the correct phase demodulation can be ensured. Besides, using the developed method, when the values of N or M are chosen in advance, the corresponding available measurement ranges can be given. Besides, the relationship between the window length and the measurement limitation of the measurable thinnest optical thickness is investigated. Considering the common linear and nonlinear errors in the wavelength-shifting process, the error analysis of FPSMA is performed and discussed for situations close to reality. The comparative studies and the experimental results of two transparent parallel plates also support the performance of the developed FPSMA.

Ämnesord och genrebeteckningar

TEKNIK OCH TEKNOLOGIER Elektroteknik och elektronik Signalbehandling hsv//swe
ENGINEERING AND TECHNOLOGY Electrical Engineering, Electronic Engineering, Information Engineering Signal Processing hsv//eng
Harmonic analysis; Optical variables measurement; Phase measurement; Optical surface waves; Thickness measurement; Length measurement; Surface treatment; Interferometers; measurement errors; phase measurement; phase shifting interferometry; reconstruction algorithms

Biuppslag (personer, institutioner, konferenser, titlar ...)

Valyukh, SergiyLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)serva66 (författare)
He, TingtingShanghai Univ, Peoples R China (författare)
Yu, YingjieShanghai Univ, Peoples R China (författare)
Shanghai Univ, Peoples R ChinaTunnfilmsfysik (creator_code:org_t)

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Ingår i:IEEE Transactions on Instrumentation and Measurement: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC710018-94561557-9662

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Av författaren/redakt...: Chang, Lin; Valyukh, Sergiy; He, Tingting; Yu, Yingjie

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TEKNIK OCH TEKNOLOGIER: TEKNIK OCH TEKNO ...; och Elektroteknik oc ...; och Signalbehandling

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Av lärosätet: Linköpings universitet

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