Stitching interferometry of cylindrical surface

• High resolution and high precision are advantages of measuring cylindrical objects employing stitching interferometry. However, due to errors in the cylinder position in a measurement procedure, it is difficult to ensure the accuracy of a macroscopic shape contour and surface waviness contour of the workpiece of the stitching results. To overcome this problem, we proposed a new strategy of stitching interferometry for cylindricity calibration. The measuring process is divided into two parts to measure the macroscopic shape and waviness contour, respectively. Finally, the two measurement results are merged to produce an accurate and complete 360 degrees form map. Besides, we build a two-dimensional Gaussian filter weighting function for a cylindrical profile according to its special shape characteristic. To express the stitching results more precisely, we provide the uncertainty map and power spectral density of the stitching results. An experiment is carried out by taking a ceramic plug gage as the workpiece. The results demonstrate the excellent performance of our method in analyzing the characteristic of the cylindrical profile and show good agreement with such by using cylindricity measuring instruments.

Ämnesord

NATURVETENSKAP  -- Fysik -- Atom- och molekylfysik och optik (hsv//swe)

NATURAL SCIENCES  -- Physical Sciences -- Atom and Molecular Physics and Optics (hsv//eng)

Nyckelord

Stitching interferometry; Cylindricity; Two-Dimensional Gaussian Weighting; Function; Ceramic plug gage; Power Spectrum Density; 2D Legendre polynomials

Publikations- och innehållstyp

ref (ämneskategori)

art (ämneskategori)