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Structure Effect on...
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Horng, Ray-HuaNatl Yang Ming Chiao Tung Univ, Taiwan
(författare)
Structure Effect on the Response of ZnGa2O4 Gas Sensor for Nitric Oxide Applications
- Artikel/kapitelEngelska2022
Förlag, utgivningsår, omfång ...
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2022-10-26
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MDPI,2022
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electronicrdacarrier
Nummerbeteckningar
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LIBRIS-ID:oai:DiVA.org:liu-190223
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-190223URI
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https://doi.org/10.3390/nano12213759DOI
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Språk:engelska
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Sammanfattning på:engelska
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Klassifikation
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Ämneskategori:ref swepub-contenttype
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Ämneskategori:art swepub-publicationtype
Anmärkningar
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Funding Agencies|Wafer Works Corporation; National Science and Technology Council (NSTC), Taiwan [NSTC 109-2221-E-009-143-MY3, 109-2622-E009-033, 111-2634-F-A49-007, 109-2224-E-009-002, 110-2218-E-002-037, 111-2622-8-A49-018-SB, 1112923-E-A49-003-MY3, 111-2221-E-005-059, 110-2218-E-A49-020-MBK]; STINT foundation, Sweden [MG2019-8485]; MAtek [2022-T-018]
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We fabricated a gas sensor with a wide-bandgap ZnGa2O4 (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related material characteristics were also measured by scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy. This ZGO gas sensor was used to detect nitric oxide (NO) in the parts-per-billion range. In this study, the structure effect on the response of the NO gas sensor was studied by altering the sensor dimensions. Two approaches were adopted to prove the dimension effect on the sensing mechanism. In the first approach, the sensing area of the sensors was kept constant while both channel length (L) and width (W) were varied with designed dimensions (L x W) of 60 x 200, 80 x 150, and 120 x100 mu m(2). In the second, the dimensions of the sensing area were altered (60, 40, and 20 mu m) with W kept constant. The performance of the sensors was studied with varying gas concentrations in the range of 500 ppb similar to 10 ppm. The sensor with dimensions of 20 x 200 mu m(2) exhibited a high response of 11.647 in 10 ppm, and 1.05 in 10 ppb for NO gas. The sensor with a longer width and shorter channel length exhibited the best response. The sensing mechanism was provided to explain the above phenomena. Furthermore, the reaction between NO and the sensor surface was simulated by O exposure of the ZGO surface in air and calculated by first principles.
Ämnesord och genrebeteckningar
Biuppslag (personer, institutioner, konferenser, titlar ...)
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Lin, Shu-HsienNatl Yang Ming Chiao Tung Univ, Taiwan
(författare)
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Hung, Dun-RuNatl Chung Hsing Univ, Taiwan
(författare)
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Chao, Po-HsiangNatl Yang Ming Chiao Tung Univ, Taiwan
(författare)
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Fu, Pin-KueiNatl Chung Hsing Univ, Taiwan; Taichung Vet Gen Hosp, Taiwan; Taichung Vet Gen Hosp, Taiwan
(författare)
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Chen, Cheng-HsuNatl Chung Hsing Univ, Taiwan
(författare)
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Chen, Yi-CheNatl Chung Hsing Univ, Taiwan
(författare)
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Shao, Jhih-HongNatl Chung Hsing Univ, Taiwan
(författare)
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Huang, Chiung-YiNatl Yang Ming Chiao Tung Univ, Taiwan
(författare)
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Tarntair, Fu-GowNatl Yang Ming Chiao Tung Univ, Taiwan
(författare)
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Liu, Po-LiangNatl Chung Hsing Univ, Taiwan
(författare)
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Hsiao, Ching-LienLinköpings universitet,Tunnfilmsfysik,Tekniska fakulteten(Swepub:liu)chihs76
(författare)
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Natl Yang Ming Chiao Tung Univ, TaiwanNatl Chung Hsing Univ, Taiwan
(creator_code:org_t)
Sammanhörande titlar
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Ingår i:Nanomaterials: MDPI12:212079-4991
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Till lärosätets databas
- Av författaren/redakt...
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Horng, Ray-Hua
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Lin, Shu-Hsien
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Hung, Dun-Ru
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Chao, Po-Hsiang
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Fu, Pin-Kuei
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Chen, Cheng-Hsu
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visa fler...
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Chen, Yi-Che
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Shao, Jhih-Hong
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Huang, Chiung-Yi
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Tarntair, Fu-Gow
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Liu, Po-Liang
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Hsiao, Ching-Lie ...
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