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Structural evolution and thermoelectric properties of Mg3SbxBi2-x thin films deposited by magnetron sputtering

Sadowski, Grzegorz (författare)
Malmö universitet,Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Malmo Univ, Sweden,Institutionen för materialvetenskap och tillämpad matematik (MTM),Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University
Shu, Rui (författare)
Linköpings universitet,Laboratoriet för organisk elektronik,Tekniska fakulteten,Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University 2 , Linköping SE-581 83, Sweden
Le Febvrier, Arnaud (författare)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University 2 , Linköping SE-581 83, Sweden
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Han, Zhijia (författare)
Southern Univ Sci & Technol, Peoples R China,Department of Materials Science and Engineering, Southern University of Science and Technology 3 , Shenzhen, Guangdong 518055, China
Music, Denis (författare)
Malmö universitet,Institutionen för materialvetenskap och tillämpad matematik (MTM),Biofilms Research Center for Biointerfaces,Malmo Univ, Sweden; Malmo Univ, Sweden
Liu, Weishu (författare)
Southern Univ Sci & Technol, Peoples R China; Southern Univ Sci & Technol, Peoples R China,Department of Materials Science and Engineering, Southern University of Science and Technology 3 , Shenzhen, Guangdong 518055, China;Guangdong Provincial Key Laboratory of Functional Oxide Materials and Devices, Southern University of Science and Technology 5 , Shenzhen, Guangdong 518055, China
Eklund, Per (författare)
Linköpings universitet,Tunnfilmsfysik,Tekniska fakulteten,Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University 2 , Linköping SE-581 83, Sweden
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 (creator_code:org_t)
A V S AMER INST PHYSICS, 2023
2023
Engelska.
Ingår i: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films. - : A V S AMER INST PHYSICS. - 0734-2101 .- 1520-8559. ; 41:4
  • Tidskriftsartikel (refereegranskat)
Abstract Ämnesord
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  • Mg3Bi2-based compounds are of great interest for thermoelectric applications near room temperature. Here, undoped p-type Mg3SbxBi2-x thin films were synthesized using magnetron sputtering (three elemental targets in Ar atmosphere) with a growth temperature of 200 ? on three different substrates, namely, Si as well as c- and r-sapphire. The elemental composition was measured with energy-dispersive x-ray spectroscopy and the structure by x-ray diffraction. The electrical resistivity and the Seebeck coefficient were determined under He atmosphere from room temperature to the growth temperature. All samples are crystalline exhibiting the La2O3-type crystal structure (space group P-3m1). The observed thermoelectric response is consistent with a semiconductive behavior. With increasing x, the samples become more electrically resistive due to the increasing bandgap. High Bi content (x < 1) is thus beneficial due to lower resistivity and a higher power factor near room temperature. Thermoelectric thin films synthesized at low temperatures may provide novel pathways to enable flexible devices on polymeric and other heat-sensitive substrates.

Ämnesord

NATURVETENSKAP  -- Kemi -- Oorganisk kemi (hsv//swe)
NATURAL SCIENCES  -- Chemical Sciences -- Inorganic Chemistry (hsv//eng)
TEKNIK OCH TEKNOLOGIER  -- Materialteknik (hsv//swe)
ENGINEERING AND TECHNOLOGY  -- Materials Engineering (hsv//eng)

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