Search: WFRF:(Gueorguiev Gueorgui Kostov) >
AlGaInN metal-organ...
AlGaInN metal-organic-chemical-vapor-deposition gas-phase chemistry in hydrogen and nitrogen diluents : First-principles calculations
-
- Kakanakova-Georgieva, Anelia, 1970- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
- Gueorguiev, Gueorgui Kostov, 1968- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
-
- Stafström, Sven, 1957- (author)
- Linköpings universitet,Tekniska högskolan,Beräkningsfysik
-
show more...
-
- Hultman, Lars, 1960- (author)
- Linköpings universitet,Tekniska högskolan,Tunnfilmsfysik
-
- Janzén, Erik, 1954- (author)
- Linköpings universitet,Tekniska högskolan,Halvledarmaterial
-
show less...
-
(creator_code:org_t)
- Elsevier BV, 2006
- 2006
- English.
-
In: Chemical Physics Letters. - : Elsevier BV. - 0009-2614 .- 1873-4448. ; 431:4-6, s. 346-351
- Related links:
-
https://urn.kb.se/re...
-
show more...
-
https://doi.org/10.1...
-
show less...
Abstract
Subject headings
Close
- Direct impact of H2 and N2 diluents on the metal-organic-chemical-vapor-deposition gas-phase chemistry in M(CH3)3/NH3 (M = Al, Ga, In) systems is identified in the framework of Density Functional Theory in terms of cohesive energy differences. While both diluents destabilize model reaction species, i.e. adducts, transition states and chain complexes, the effect is particularly strong with respect to N2 in the Al(CH3)3/NH3 system, and can be a factor to restrain the expansion of chain complexes that deplete the gas-phase from precursors. Theoretical results are supported by experimental evidences of higher growth rate and superior optical properties of AlN grown in N2 vs. H2 diluent. © 2006 Elsevier B.V. All rights reserved.
Keyword
- NATURAL SCIENCES
- NATURVETENSKAP
Publication and Content Type
- ref (subject category)
- art (subject category)
Find in a library
To the university's database