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Thick epilayers for...
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Henry, Anne,1959-Linköpings universitet,Halvledarmaterial,Tekniska högskolan
(author)
Thick epilayers for power devices
- Article/chapterEnglish2007
Publisher, publication year, extent ...
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Trans Tech Publications,2007
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printrdacarrier
Numbers
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LIBRIS-ID:oai:DiVA.org:liu-38679
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-38679URI
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https://doi.org/10.4028/www.scientific.net/MSF.556-557.47DOI
Supplementary language notes
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Language:English
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Summary in:English
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Subject category:ref swepub-contenttype
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Subject category:kon swepub-publicationtype
Notes
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Growth of thick epitaxial SiC layers needed for high power devices is presented for horizontal hot-wall CVD (HWCVD) reactors. We demonstrate thickness of epilayer of 100 μm and more with good morphology, low-doping with no doping variation through the whole thick layer and reasonable carrier lifetime which mainly depends on the substrate quality. Typical epidefects are described and their density can dramatically be reduced when choosing correctly the growth conditions as well as the polishing of the surface prior to the growth. The control of the doping and thickness uniformities as well as the run-to-run reproducibility is also presented. Various characterization techniques such as optical microscopy, AFM, reflectance, CV, PL and minority carrier lifetime have been used. Results of high-voltage SiC Schottky power devices are presented.
Subject headings and genre
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NATURAL SCIENCES
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NATURVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
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ul-Hassan, Jawad,1974-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)jawul47
(author)
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Pedersen, Henrik,1981-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)henpe50
(author)
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Beyer, Franziska,1980-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)frabe40
(author)
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Bergman, Peder,1961-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)pedbe86
(author)
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Andersson, Sven,1959-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)svean88
(author)
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Janzén, Erik,1954-Linköpings universitet,Halvledarmaterial,Tekniska högskolan(Swepub:liu)erija14
(author)
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Godignon, P.
(author)
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Linköpings universitetHalvledarmaterial
(creator_code:org_t)
Related titles
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In:Materials Science Forum, vol. 556-557: Trans Tech Publications, s. 47-
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Henry, Anne, 195 ...
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ul-Hassan, Jawad ...
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Pedersen, Henrik ...
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Beyer, Franziska ...
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Bergman, Peder, ...
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Andersson, Sven, ...
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Janzén, Erik, 19 ...
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Godignon, P.
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Linköping University