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Contact-Less Electr...
Contact-Less Electrical Defect Characterization of Semi-Insulating 6H-SiC Bulk Material
- Article/chapterEnglish2009
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Trans Tech Publications,2009
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printrdacarrier
Numbers
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LIBRIS-ID:oai:DiVA.org:liu-41964
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-41964URI
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https://doi.org/10.4028/www.scientific.net/MSF.600-603.405DOI
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Language:English
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Summary in:English
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Subject category:ref swepub-contenttype
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Subject category:kon swepub-publicationtype
Notes
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The novel technique microwave detected photo induced current transient spectroscopy (MD-PICTS) was applied to semi-insulating 6H-SiC in order to investigate the properties of inherent defect levels. Defect spectra can be obtained in the similar way to conventional PICTS and DLTS. However, there is no need for contacting the samples, which allows for non-destructive and spatially resolved electrical characterization. This work is focused on the investigation of semi-insulating 6H-SiC grown under different C/Si-ratios. In the corresponding MD-PICTS spectra several shallow defect levels appear in the low temperature range. However the peak assignment needs further investigation. Additionally different trap reemission dynamics are obtained for higher temperatures, which are supposed to be due to different compensation effects.
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Beyer, Franziska,1980-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)frabe40
(author)
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Gällström, Andreas,1978-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)andga78
(author)
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Carlsson, Patrick,1975-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)patca49
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Henry, Anne,1959-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)annhe32
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Magnusson, Björn,1970-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)bjoma90
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Niklas, J.
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Janzén, Erik,1954-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)erija14
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Linköpings universitetTekniska högskolan
(creator_code:org_t)
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In:Materials Science Forum Vols. 600-603: Trans Tech Publications, s. 405-408
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Hahn, S.
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Beyer, Franziska ...
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Gällström, Andre ...
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Carlsson, Patric ...
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Henry, Anne, 195 ...
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Niklas, J.
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- NATURAL SCIENCES
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NATURAL SCIENCES
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Linköping University