Search: id:"swepub:oai:DiVA.org:liu-43530" >
Single Crystal and ...
-
Henry, Anne,1959-Linköpings universitet,Tekniska högskolan,Halvledarmaterial
(author)
Single Crystal and Polycrystalline 3C-SiC for MEMS Applications
- Article/chapterEnglish2009
Publisher, publication year, extent ...
-
Trans Tech Publications,2009
-
printrdacarrier
Numbers
-
LIBRIS-ID:oai:DiVA.org:liu-43530
-
https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-43530URI
-
https://doi.org/10.4028/www.scientific.net/MSF.615-617.625DOI
Supplementary language notes
-
Language:English
-
Summary in:English
Part of subdatabase
Classification
-
Subject category:ref swepub-contenttype
-
Subject category:kon swepub-publicationtype
Notes
-
Cantilever resonators have been fabricated from two types of materials, single crystal and polycrystalline 3C-SiC films. The films have been grown in a hot-wall chemical vapor deposition reactor on 100 mm diameter p-type boron-doped (100) Si wafer without rotation of the wafer. The crystal structure of the films have been accessed with X-ray diffraction. The cantilever devices have been fabricated using a one-step etch and release process; the beam length has been varied between 50 and 200 µm. Resonant frequencies in the range 110 KHz – 1.5 MHz and 50 – 750 KHz have been obtained for single crystal and polycrystalline SiC devices, respectively. Furthermore, the experimental resonance frequencies have been used to calculate the Young’s Modulus E for the two different types of SiC. The single crystal SiC, possessing a very high Young’s Modulus (446 GPa), should be an optimal material for RF-MEMS applications.
Subject headings and genre
-
NATURAL SCIENCES
-
NATURVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
-
Janzén, Erik,1954-Linköpings universitet,Tekniska högskolan,Halvledarmaterial(Swepub:liu)erija14
(author)
-
Mastropaolo, E.
(author)
-
Cheung, R.
(author)
-
Linköpings universitetTekniska högskolan
(creator_code:org_t)
Related titles
-
In:Materials Science Forum Vols. 615-617: Trans Tech Publications, s. 625-6289780878493340
Internet link
Find in a library
To the university's database