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Electrical characte...
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Konofaos, N.Department of Physics, University of Ioannina, P.O. Box 1186, 451 10 Ioannina, Greece
(author)
Electrical characterisation of SrTiO3/Si interfaces
- Article/chapterEnglish2002
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Numbers
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LIBRIS-ID:oai:DiVA.org:liu-47021
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https://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-47021URI
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https://doi.org/10.1016/S0022-3093(02)00983-3DOI
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Language:English
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Summary in:English
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Subject category:ref swepub-contenttype
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Subject category:art swepub-publicationtype
Notes
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Deposition of SrTiO3 (STO) thin films by ultra-high vacuum rf magnetron sputtering was performed in order to produce high-quality STO/p-Si (1 0 0) interfaces and STO insulator layers with high dielectric constants. The deposition temperatures were in the range from room temperature to 550 °C. Capacitance-voltage (C-V) and conductance-frequency measurements showed that the dielectric constant of the films ranges from 55 to 120. C-V measurements on Al/STO/p-Si structures clearly revealed the creation of metal-insulator-semiconductor diodes. The interface state densities (Dit) at the STO/p-Si interfaces were obtained from admittance spectroscopy measurements. The samples deposited at lower temperatures revealed values of Dit between 2 × 1011 and 3.5 × 1012 eV-1 cm-2 while the higher temperature deposited samples had a higher Dit ranging between 1 × 1011 and 1 × 1013 eV-1 cm-2. The above results were also well correlated to X-ray diffraction measurements, Rutherford backscattering spectroscopy, and spectroscopic ellipsometry. © 2002 Elsevier Science Ltd. All rights reserved.
Subject headings and genre
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TECHNOLOGY
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TEKNIKVETENSKAP
Added entries (persons, corporate bodies, meetings, titles ...)
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Evangelou, E.K.Department of Physics, University of Ioannina, P.O. Box 1186, 451 10 Ioannina, Greece
(author)
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Wang, Z.
(author)
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Kugler, Veronika MozhdehLinköpings universitet,Tekniska högskolan,Institutionen för fysik, kemi och biologi(Swepub:liu)verku81
(author)
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Helmersson, UlfLinköpings universitet,Tekniska högskolan,Plasma och ytbeläggningsfysik(Swepub:liu)ulfhe30
(author)
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Department of Physics, University of Ioannina, P.O. Box 1186, 451 10 Ioannina, GreeceTekniska högskolan
(creator_code:org_t)
Related titles
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In:Journal of Non-Crystalline Solids303:1, s. 185-1890022-30931873-4812
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